| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method for a substrate conveying robot enabling easily even a user without expertise to change the setting of control parameters for the substrate conveying robot SOLUTION: In this control method for the substrate conveying robot, the distance to a target position corresponds to the pulse quantity of a driving system and can be considered as the area of an isosceles triangle with the operating time T set as the base and with the target maximum speed Sp set as the vertex. When the target maximum speed exceeds the tolerance limit speed, the distance to the target position can be considered as the area of a trapezoid with constant speed moving time set between the acceleration and deceleration time, with the target maximum speed set as the tolerance limit speed. The parameters for the grade of acceleration and deceleration for controlling a control object within the given conveyance time, time to add the same, time for constant speed movement at the tolerance limit speed, and the like can thereby be easily determined in either case. |
