| 摘要 |
PROBLEM TO BE SOLVED: To provide an inner shield which exhibits excellent effect on life prolongation and can greatly reduce running cost in the inner shield made of carbon or C/C for a silicon single crystal lifting device. SOLUTION: A heat insulating material (an inner shield) of the silicon single crystal lifting device is characterized in that a carbon fiber reinforced carbon material of thin thickness is freely attachably/detachably attached to an inside part thereof at a position of about 2/3 from the lower part. When consumption of the carbon fiber reinforced carbon material attached to the inside part of the heat insulating material has proceeded, the carbon fiber reinforced carbon material is detached from the heat insulating material, is attached to the heat insulating material again by turning upside down and is used. When consumption has further proceeded to a life end, the carbon fiber reinforced carbon material is exchanged for new one. Usage of the heat insulating material of the silicon single crystal lifting device is characterized by enabling the repetition of a procedure described above.
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