METHOD FOR FABRICATING MICRO LENS

摘要

PURPOSE: A method for fabricating a micro lens is provided, which has a cross section in a shape of a hyperhemisphere. CONSTITUTION: According to the method, a sacrificial layer(20a) is formed on a silicon or glass substrate(10), and an epilayer pattern whose cross section is deformed into a sphere shape by a surface tension according to the heating is formed on the above sacrificial layer. And the sacrificial layer is laterally etched using the epilayer pattern. And the epilayer pattern is reflowed by heating the epilayer pattern. And at least a part of the cross section of the micro lens is in a hyperhemisphere shape.