发明名称 METHOD OF MANUFACTURING AN ELECTRODE FOR A PLASMA REACTOR AND SUCH ELECTRODE
摘要 The invention relates to a method for manufacturing an electrode for a plasma reactor, comprising the step of interconnecting a support ring and an electrode plate provided with through holes mechanically and electrically by means of a shrink connection, wherein the connecting step furthermore comprises the application of an electrically conductive layer to the joining interface between the electrode plate and the support ring. Furthermore an electrode is provided, wherein said support ring and said electrode include interlocking parts, to the joining surface at which the electrically conductive layer is applied.
申请公布号 EP1240660(A1) 申请公布日期 2002.09.18
申请号 EP20000991352 申请日期 2000.12.22
申请人 XYCARB CERAMICS B.V. 发明人 VAN DEN CRUIJSEM, SJOERD;VAN LEEUWEN, ROBERTUS, JACOBUS;MICHORIUS, MARCEL, MARIA
分类号 H05H1/46;C23C16/458;H01J37/32 主分类号 H05H1/46
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