COATING FORMING APPARATUS AND COATING FORMING METHOD

摘要

PURPOSE: To provide a coating forming apparatus capable of shortening the cycle time of a coating forming line without requiring a robot or the like required to be capable of performing complicated movements. CONSTITUTION: The coating forming apparatus comprises a coating apparatus, a rotating apparatus, a first vacuum drying apparatus, a second vacuum drying apparatus, a washing apparatus and a heating apparatus arranged in this order from the upstream side to the downstream side along a transportation line of a substrate.