发明名称 LIGHT SHIELDING MASK AND INSPECTION METHOD FOR COLOR FILTER
摘要 PROBLEM TO BE SOLVED: To provide a light shielding mask capable of enhancing inspection accuracy in color irregularity inspection of a color filter used in a flat panel display or the like. SOLUTION: The surface facing at least the color filter, of a light shielding pattern of the light shielding mask is formed in a low reflecting surface to visible light.
申请公布号 JP2002267572(A) 申请公布日期 2002.09.18
申请号 JP20010062803 申请日期 2001.03.07
申请人 CANON INC 发明人 YANAI HIROSHI
分类号 G01M11/00;G02B5/00;G02B5/20;G02F1/13;G02F1/1335;G09F9/00 主分类号 G01M11/00
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