| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning mechanism capable of executing the positioning with high accuracy by simple control without using a mechanical means in a moving mechanism having an actuator using the pressurized working fluid. SOLUTION: The positioning mechanism is driven by the actuator 20 operated by the pressurized working fluid. The influence of the frictional resistance to a mechanical system of the positioning mechanism can be reduced by supplying the working fluid to the actuator 20 while controlling the pressure of the working fluid to become the damped oscillation.
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