WAFER SORTING APPARATUS AND METHOD FOR THE SAME

摘要

PURPOSE: An apparatus and a method of wafer sorting are provided to allow improving a speed of arranging and sorting wafers by effectively utilizing the waiting time of an aligner and a robot arm. CONSTITUTION: The apparatus includes a loading cassette(20) for containing a plurality of wafers(10) to be sorted, several unloading cassettes(30) for containing the wafers(10) to have been sorted, the aligner(100) for aligning and sorting the wafers(10), and the robot arm(40) for transferring the wafers(10) in the loading cassette(20) to a rotating chuck(110) of the aligner(100) or transferring the sorted wafers(10) to the corresponding unloading cassettes(30). The apparatus further has a buffer loader(200), which temporarily holds the wafer(10) to have been sorted while the next wafer(10) is being sorted by the aligner(100). Therefore, the use of the buffer loader(200) reduces the waiting time of the aligner(100) and the robot arm(40).