发明名称 FINE MACHINING DEVICE AND FINE MACHINING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a fine machining device and a fine machining method allowing easy machining of all patterns without generating a pattern impossible to machine in machining the complicated machining pattern transformed into an insulator, on a conductive workpiece. SOLUTION: This machining device is provided with a conductive probe, carries out the relative scan of the conductive probe to the conductive workpiece, and applies voltage between the conductive probe and the conductive workpiece to form a machining pattern transformed into the insulator, on the workpiece. In this constitution, the machining data on the closed region surrounded by the machining pattern transformed into the insulator is processed to rearrange the machining procedure.
申请公布号 JP2002264100(A) 申请公布日期 2002.09.18
申请号 JP20010065556 申请日期 2001.03.08
申请人 CANON INC 发明人 SHITO SHUNICHI;ITSUJI TAKEAKI
分类号 B82B3/00;G01Q60/10;G01Q60/16;G01Q80/00;(IPC1-7):B82B3/00;G01N13/12 主分类号 B82B3/00
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