| 摘要 |
PROBLEM TO BE SOLVED: To enable to easily obtain a working curve between the speed for every substrate surface, propagating direction and mode and another chemical/ physical various characteristics by a numeric calculation without experimenting. SOLUTION: In the method of evaluating material by ultrasonic measurement, a desired independent component previously selected from sound-relating physical constant (elastic constant, piezoelectric constant, permittivity, elastic constant and density) of the material are previously determined as a function of a chemical composition ration, obtaining the speed to the arbitrary substrate surface, propagating direction and mode can be obtained as a function of the chemical composition ratio by a numeric calculation, and the feed back of the evaluation of the material by the speed measurement and material manufacturing conditions can be efficiently performed.
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