发明名称 |
Polished-piece holder and manufacturing method thereof |
摘要 |
<p>A polished-piece holder is provided that does not easily stick or adsorb to a polishing pad of a polishing apparatus and reduces occurrences of production line troubles and therefore the number of failed polished pieces. A single sheet of a thermosetting resin impregnated fiber substrate or a laminated sheet formed by laminating a plurality of sheets of the thermosetting resin impregnated fiber substrate is formed under heat and pressure into a plate. The thermosetting resin impregnated fiber plate is then processed to form a polished-piece holder for holding pieces to be polished. The evaluation portion has a certain length in a direction of the average line. The thermosetting resin impregnated fiber plate has a surface roughness with a maximum wave height Ry of 10 um or greater over an almost entire area of the surface layer. The maximum wave height Ry is determined in an evaluation portion of a wave curve by summing a height Rp of a highest crest and a depth Rv of a deepest trough from an average line of the wave curve. The wave curve is taken from a cross-sectional curve obtained by the surface roughness measuring device. <Figure 1></p> |
申请公布号 |
IE20020146(A1) |
申请公布日期 |
2002.09.18 |
申请号 |
IE20020000146 |
申请日期 |
2002.02.25 |
申请人 |
SHIN-KOBE ELECTRIC MACHINERY CO LTD |
发明人 |
KATSUJI TAKAHASHI;HIROKAZU HIRAOKA;MASAYUKI NODA |
分类号 |
B24B37/28;B29C70/34;B32B1/00;(IPC1-7):B08B3/12 |
主分类号 |
B24B37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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