| 摘要 |
The present invention provides a semiconductor device having an inkjet recording capability and a method of making such a device. The present invention also provides an inkjet head to which an inkjet recording mode for producing an output of information including characters and images is applicable, a recording apparatus on which such a recording head can be fixed or detachably installed, and an information-processing system having such a recording apparatus as its output member. In particular, the present invention relates to an inkjet recording head of the side-shooter type that ejects a droplet of recording liquid perpendicularly on a surface thereof where a plurality of elements for generating ejection-energies to be used for ejecting ink is formed. A semiconductor device with an inkjet recording capability has: a silicon substrate having a denuded zone (DZ) and a oxygen precipitate (OP) layer, where the OP layer contains oxygen precipitates (OPs); energy-generating elements for generating energies for ejecting ink, which are formed on the silicon substrate; ink-supplying openings provided as through-holes formed on the silicon substrate; ink-flow channels provided in a layer of forming flow channels being stacked on the silicon substrate, communicating with the ink-supplying openings and corresponding to the energy-generating elements, respectively; and ink-ejecting orifices provided in a layer of forming orifices being stacked on the layer of forming flow channels, communicating with the ink-flow channels, respectively.
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