| 摘要 |
An apparatus for abrading a substrate including a moveable abrading tool having a bur for abrading the substrate, a stage for supporting the substrate, and a height sensing device in communication with the abrading tool to determine a vertical position of the bur with respect to the substrate. Further disclosed is a method for abrading a substrate using the foregoing apparatus including moving the abrading tool across the substrate so as to abrade the substrate, determining the vertical position of the bur with the height sensing device, and communicating the vertical position of the bur to the abrading tool.
|
