发明名称 Field emission type cold-cathode electron gun with focusing electrode
摘要 A cold-cathode electron gun includes a cold cathode, a conical Wehnelt electrode, and an undercut. The cold cathode has an emitter formed on a substrate to emit electrons,. a gate electrode formed on the substrate through a first insulating film so as to surround a distal end of the emitter, and a focusing electrode formed on the gate electrode through a second insulating film to correspond to the gate electrode. The conical Wehnelt electrode connects the focusing electrode to a first external power supply. The Wehnelt electrode has an opening, at its conical distal end, that comes into with the cold cathode to surround an emitter region including the emitter, gate electrode, and focusing electrode. The undercut is formed in a portion of the Wehnelt electrode which is to come into contact with the focusing electrode to correspond to the gate electrode, thereby forming a non-contact portion.
申请公布号 US6452335(B1) 申请公布日期 2002.09.17
申请号 US20000669111 申请日期 2000.09.25
申请人 NEC CORPORATION 发明人 TSUIDA SHUNJI
分类号 H01J1/304;H01J3/02;H01J23/06;(IPC1-7):H01J17/04 主分类号 H01J1/304
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