| 发明名称 |
Carrier head with multi-part flexible membrane |
| 摘要 |
A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a load to a substrate. A central portion of the flexible membrane is formed of a first material with a different rigidity than a second material that forms the annular portion of the flexible membrane.
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| 申请公布号 |
US6450868(B1) |
申请公布日期 |
2002.09.17 |
| 申请号 |
US20000535575 |
申请日期 |
2000.03.27 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ZUNIGA STEVEN M.;CHEN HUNG CHIH;TSENG MING KUIE |
| 分类号 |
B24B7/22;B24B37/00;B24B37/04;B24B41/06;F16J3/02;H01L21/304;(IPC1-7):B24B47/00 |
主分类号 |
B24B7/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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