| 摘要 |
The present invention provides a wavelength-stabilized narrow band excimer laser device which has a discharge tube, a cavity formed of both an output mirror at a front side and a total reflection mirror at a rear side, and a wavelength selective element positioned between the front and rear mirrors, wherein the output mirror, the total reflection mirror and the wavelength selective element are securely fixed on a supporting structure which is mounted via a vibration removing device over a mount on which the discharge tube is mounted so that the output mirror, the total reflection mi rrorand the wavelength selective element are free from a ny vibration of the discharge tube. The wavelength selective element comprises at least a prism and at least an etalon wherein the above novel wavelength-stabilized narrow band excimer laser device may further have at least a beam splitter for causing a laser beam sprite, a spectroscope for measuring a center wavelength of the split laser beam, a beam-position detector for measuring a direction of the laser emission, a first driver for adjusting a laser beam transmission angle of the etalon, a second driver for adjusting an angle of the total reflection mirror, and a controller for controlling both the first dri ver in accordance with variations in the center wavelengthof the laser beam measured by the spectroscope and the second driver in accordance with variations in the direction of the laser emission measured by the beam- position detector.
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