发明名称 Apparatus and method for measuring a defect of a sample
摘要 An apparatus includes an inspection jig having a sample mounting fixture for mounting a sample, a vibrator for applying a vibration to the sample, and a sound collector for collecting vibration sound when the vibration is applied to the sample, and a sound detector for frequency analysis of the vibration sound collected by the sound collector. The sample is pinched and fixed by a contact surface of the sound collector and a fixing part with a contact area similar to the contact surface when the sample is mounted in the sample mounting fixture. The sample mounting fixture is mounted on a shaft of an inspection jig fixed in a bearing.
申请公布号 US6450035(B1) 申请公布日期 2002.09.17
申请号 US20000692201 申请日期 2000.10.20
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 NISHIZONO SHIGEO
分类号 G01N29/12;G01N29/04;(IPC1-7):G01N29/00 主分类号 G01N29/12
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