发明名称 Single electron resistor memory device and method
摘要 A memory device includes a plurality of cells, each having a first electrode coupled to a first location on semiconductor material, a second electrode coupled to a second location disposed away from the first location on the semiconductor material and a plurality of islands of semiconductor material. The islands have a maximum dimension of three to five nanometers and are surrounded by an insulator having a thickness of between five and twenty nanometers. The islands and the surrounding insulator are formed in pores extending into the semiconductor material between the first and second electrodes. As a result, the memory cells are able to provide consistent, externally observable changes in response to the presence or absence of a single electron on the island.
申请公布号 US6452831(B2) 申请公布日期 2002.09.17
申请号 US20010944258 申请日期 2001.08.29
申请人 MICRON TECHNOLOGY, INC. 发明人 AHN KIE Y.;FORBES LEONARD
分类号 G11C11/34;G11C16/04;H01L29/788;(IPC1-7):G11C11/00 主分类号 G11C11/34
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