发明名称 FILM WORKING METHOD AND FILM PHOTOELECTRIC CONVERSION MODULE
摘要 <p>PROBLEM TO BE SOLVED: To provide a film working method capable of grooving a thin film with high working precision without controlling a distance from a focusing lens to the film precisely and to provide a film photoelectric conversion module manufactured by using such a film working method. SOLUTION: The film working method includes a process for focusing gauss beams 30 emitted from a laser 52 with the focusing lens 56 to irradiate the film 58 with it and relatively moving the optical axis of the beams 30 focused by the lens 56 and the film 58 to groove the film 58. The process is performed under a condition that laser beams are adjusted so that the function w=f(d) of a distance (d) from the lens 56 to the film 58 and the width (w) of a groove which can be formed at the distance (d) has two maximum values and a single minimum value, and the minimum value is within the working tolerance of the width of the groove to be formed actually.</p>
申请公布号 JP2002263868(A) 申请公布日期 2002.09.17
申请号 JP20010060566 申请日期 2001.03.05
申请人 KANEGAFUCHI CHEM IND CO LTD 发明人 HAYASHI KATSUHIKO;NAKADA TOSHINOBU
分类号 B23K26/00;H01L31/04;H01S3/00;(IPC1-7):B23K26/00 主分类号 B23K26/00
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