| 摘要 |
PROBLEM TO BE SOLVED: To prevent the oxidation of the external electrode of an excimer lamp and other constituent parts thereof by ozone and to also efficiently cool the excimer lamp without using a lamp house high in airtightness or the like. SOLUTION: In the ultraviolet irradiation device 100, the cylindrical excimer lamp 104 is supported by a support means 102 arranged so as to cover the upper surface side of the excimer lamp. Nitrogen gas is ejected to the exposed surface of the excimer lamp during the operation of the excimer lamp from the nitrogen gas jet pipe 112 connected to a nitrogen gas supply source. The atmosphere around the excimer lamp 104 is substituted with the nitrogen gas ejected to the excimer lamp 104 to avoid such a phenomenon that ozone comes into contact with the external electrode to oxidize the same. Further, the cooling of the excimer lamp can be efficiently performed by directly spraying inert gas to the outer peripheral surface of the excimer lamp. |
