Method of manufacture of a thermal actuated ink jet printer

摘要

A method of manufacturing an ink jet printhead that includes etching a plurality of ink chambers in a semiconductor wafer that includes electrical circuitry. A first and second expansion layer and a conductive material layer between the first and second expansion layers are deposited on to the wafer and etched. The expansion layers are formed to be positioned over the ink chambers. Furthermore, the expansion layers are provided of a material that facilities displacement of the expansion layers upon heating thereof by the conductive material layer. The method includes the step of forming the expansive layers and conductive material layer into shutters for each ink chamber.