METHOD OF POLISHING, POLISHING TOOL AND OPTICAL PART

摘要

PROBLEM TO BE SOLVED: To provide a method of polishing, a polishing tool and an optical part for polishing the optical part highly precisely while appropriately eliminating waviness. SOLUTION: In the polishing tool 1, spherical polishing parts 2 and 3 of the same size are connected with a shaft 4 made of carbide or ceramics. The processed surface 11 of a workpiece 10 is polished with the direction of the shaft 4 as the direction of polishing process while controlling the polishing pressing force to be constant along the shape on the processed surface 11. The polishing tool 1 has two polishing contact points on the processed surface 11. Therefore, the waviness with small amplitude and longer wavelength than the contact width of the polishing tool 1 can be securely and efficiently eliminated.