| 摘要 |
A piezoelectric vacuum pump that includes a diaphragm comprising an upper diaphragm member and a lower diaphragm member. The diaphragm members preferably comprise thin metal sheets that are plated with a noble metal, such as gold, silver, or platinum, and are mated together so as to form a hermetic seal along the length of the diaphragm. The piezoelectric vacuum pump further includes a plurality of piezoelectric bimorph elements that are mounted to the upper surface of the upper diaphragm member. When the piezoelectric bimorph elements are electrically activated, they cause a localized portion of the upper diaphragm member to flex, thereby creating a change in volume in a portion of the diaphragm proximate to that piezoelectric bimorph element. The apparatus further includes a sequencing circuit that provides a patterned switching sequence to control electrical activation of selected piezoelectric bimorph elements such that a volume of gas is drawn into an input port, moved through the diaphragm, and exhausted out of an output port.
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