发明名称 Method of fabricating a multistack 3-dimensional high density semiconductor device
摘要 A multistack 3-D semiconductor structure comprising a first level structure comprising a first semiconductor substrate and first active devices; and a second level structure comprising a SOI semiconductor structure bonded to the first level structure and further comprising second active devices; and wherein the first active devices are more heat tolerant than the second active devices is provided along with a method for its fabrication.
申请公布号 US6451634(B2) 申请公布日期 2002.09.17
申请号 US20010925525 申请日期 2001.08.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 MA WILLIAM HSIOH-LIEN;SCHEPIS DOMINIC JOSEPH
分类号 H01L23/52;H01L21/02;H01L21/3205;H01L21/762;H01L21/768;H01L27/00;H01L27/12;(IPC1-7):H01L21/84 主分类号 H01L23/52
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