ELECTROSTATIC CAPACITANCE GYROSCOPE ARRAY

摘要

PURPOSE: An electrostatic capacitance gyroscope array is provided to obtain a high resolution with extending the number of cells. CONSTITUTION: An electrostatic capacitance gyroscope array includes a number of cells provided with symmetric inertia objects(123) arrayed in the same number along a direction orthogonal to each other, springs(129) connected to the symmetric inertia objects and spring supporting members(121) for supporting the springs(129) against a substrate, driving combs(125) for driving the cells, feedback combs(127) for feedback controlling the cells and connecting inertia objects(126) connected between the cells for keeping the symmetric of the cells.