METHOD FOR STORING LOT INFORMATION OF SEMICONDUCTOR MANUFACTURING PROCESS

摘要

PURPOSE: A method for storing the lot information of a semiconductor manufacturing process is provided to enhance the rapidness of the process and the reliability of the data by receiving the lot information through a barcode attached to each lot and storing the inputted data and to enhance the work efficiency by carrying out the real time track in/out. CONSTITUTION: A data input/storing system reads out the lot barcode through a barcode reader(S1) and receives the lot information from the read barcode data(S2). The system successively stores the lot information in a memory(S3). A transmission part transmits the lot information stored in the memory to a semiconductor process automation system through a communication network(S4). In order to carry out the process, the process automation system starts a process by tacking in the lot corresponding to the transmitted lot information in equipment(S5,S6). If the process is ended, the automation system tracks out the lot(S7) and repeatedly carries out the process by tracking in the lot corresponding to the next lot information transmitted from the data input/storing system.