Method for real-time control of the fabrication of a thin-film structure by ellipsometric measurement

摘要

Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which: variables directly linked to the ellipsometric ratio rho=tan &PSgr; exp(iDELTA) are measured; and the said variables are compared with reference values. The comparison relates to the length of the path traveled at a time t in the plane of the variables with respect to an initial point at time t0, for each layer participating in the thin-film structure.