发明名称 |
Oxidizing method and oxidation system |
摘要 |
An oxidation method of oxidizing surfaces of workpieces heated at a predetermined temperature in a vacuum atmosphere in a processing vessel produces active hydroxyl and active oxygen species. The active hydroxyl and active oxygen species oxidize the surfaces of the workpieces in a processing vessel. Both the intrafilm thickness uniformity and the characteristics of the oxide film can be improved, maintaining oxidation rate on a relatively high level.
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申请公布号 |
US2002127873(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20010845345 |
申请日期 |
2001.05.01 |
申请人 |
SATO SHOICHI;HASEBE KAZUHIDE;UMEZAWA KOTA |
发明人 |
SATO SHOICHI;HASEBE KAZUHIDE;UMEZAWA KOTA |
分类号 |
C01B13/00;C01B13/02;H01L21/316;(IPC1-7):H01L21/31 |
主分类号 |
C01B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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