| 摘要 |
Method and apparatus for the storage and delivery of process gases to laser generators. The process gas is cooled to a few degrees K, at the required work pressure, to reach a desired density, in the order of hundreds of kg/m3. The cooled gas is then stored in a cryogenic environment at the work pressure. At the moment of use, the process gas is gradually released from the cryogenic environment and concurrently heated. the process gas flow rate from the cryogenic environment is controlled, so as to obtain the required work flow rate. The heat supplied to the gas is controlled, so as to maintain it constantly at the required work pressure. The heating of the process gas may be controlled synchronically with the flow rate of its release from the cryogenic environment to maintain the pressure substantially at its work value.
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