| 摘要 |
PURPOSE: A multi-function wafer aligner is provided to exactly detect a damage of a wafer through a wafer centering and a wafer flatzone alignment process before performing an arbitrary semiconductor manufacturing process on the wafer. CONSTITUTION: A multi-function wafer aligner comprises a base body, a wafer cassette fixing unit, a wafer transfer, a multi-function unit and central process unit. The multi-function unit further includes a wafer rotation unit(141), a position correction sensor unit(144) for correcting a wafer centering position and a wafer flatzone position, a sensor unit(145) for detecting wafer damage, a position correction sensor unit(144) and a sensor frame(149) installed with the wafer damage detecting sensor unit(145). At this point, the position correction sensor unit(144) and the sensor unit(145) for detecting wafer damage are respectively and connected with the central process unit(10).
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