| 发明名称 |
Device for picking up and depositing substrates, has vacuum for vacuum-actuated device arranged in series with vacuum of vacuum suction unit |
| 摘要 |
A device for receiving and releasing substrates, has at least one vacuum suction unit (1) for holding and releasing a substrate (2), and at least one vacuum-actuated device (5) for moving the vacuum suction unit (1) with the received substrate (2), in which the vacuum for the vacuum-actuated device (5) is connected in series with the vacuum of the vacuum suction unit (1).
|
| 申请公布号 |
DE10111471(A1) |
申请公布日期 |
2002.09.12 |
| 申请号 |
DE20011011471 |
申请日期 |
2001.03.09 |
| 申请人 |
SINGULUS TECHNOLOGIES AG |
发明人 |
REISING, MICHAEL;KEMPF, STEFAN |
| 分类号 |
H01L21/683;(IPC1-7):B65G47/90;B65G49/07 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
