CYLINDRICAL MAGNETRON TARGET AND APPARATUS FOR AFFIXING THE TARGET TO A ROTATABLE SPINDLE ASSEMBLY

摘要

An improved interconnection system for attaching an improved cylindrical magnetron target (200) to a rotatable flanged spindle (100) incorporates an annular extension (204) on the target (200), which fits over the edge of the spindle flange (102), facilitates centering the target (200) on the spindle (100), and helps shield target sealing surfaces. The annular extension (204) terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar (207A/207B) and a generally annular retainer ring (206) that slidable over the spindle shaft (108) and rotatable against the spindle flange (102), the retainer ring (206) having external circumferential threads that are angled away from the flange (102). The split clamping collar (207A/207B) has, at one end, an inwardly-angled, internal, circumferential threads (211) that engage the threads of the retained ring (206) to draw the target (200) and spindle (200) together as a unified assembly as the retainer ring (206) is rotat ed