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发明名称
Verfahren zur Herstellung von Halbleitervorrichtungen mit eingebautem Kondensator
摘要
申请公布号
DE69527669(D1)
申请公布日期
2002.09.12
申请号
DE19956027669
申请日期
1995.03.29
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
MATSUMOTO, SHOJI;NAGANO, YOSHIHISA;SHIMADA, YASUHIRO;IZUTSU, YASUFUMI
分类号
H01L21/02;(IPC1-7):H01L29/92
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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