发明名称 |
Wafer carrier having a low tolerance build-up |
摘要 |
A low tolerance build-up wafer carrier and method for assembling the same for supporting semiconductor wafer disks and for interfacing with processing equipment. Press-fit fasteners are used to assemble composite carriers and attach equipment interface portions to the carrier. Each press-fit fastener comprising a first fastener portion integral with a first element and a second fastener portion integral with a second element. The first and second fastener portions interferingly engaging each other when pressed together thereby connecting first and second elements without significant tolerance build-up. A further embodiment of the invention is to provide a wafer carrier having interface contact portions positioned to accept carrier contact portions, from processing equipment, through a guide plate or kinematic coupling. The interface contact portions acting to align the carrier and prevent tolerance build-up due to the flexing of the guide plate.
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申请公布号 |
US2002125169(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20010835941 |
申请日期 |
2001.04.16 |
申请人 |
BORES GREGORY W.;ZABKA MICHAEL C. |
发明人 |
BORES GREGORY W.;ZABKA MICHAEL C. |
分类号 |
B65D85/86;H01L21/673;(IPC1-7):B65D85/00;B65D85/30;B65D85/48 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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