| 摘要 |
A travelling wave-type optical modulator has a substrate made of an electro-optic material, optical waveguides fabricated on the top surface of the substrate, and electrodes for modulating an optical wave through the optical waveguide. The substrate is partially thinned from the bottom surface of the substrate to form a first thinned portion and a second thinned portion so that the thickness of the first thinned portion is set to be larger than the thickness of the second thinned portion, and the optical waveguide is positioned in the first thinned portion.
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