ELECTROSTATIC CHUCK HAVING MULTI-CAPACITANCE

摘要

PURPOSE: An electrostatic chuck having multi-capacitance is provided to load evenly a twisted substrate on an upper portion of a chuck by using the electrostatic chuck having multi-capacitance. CONSTITUTION: A conductive electrode has a shape of disc. A dielectric layer(202) has a plurality of regions. An insulator(203) is used for insulating the conductive electrode(201). A power supply line is connected with an external power source. The dielectric layer(202) is formed at an upper portion of the conductive electrode(201). The dielectric layer(202) is formed with materials having different dielectric constants. Each region has different electrostatic powers by the dielectric constants of each dielectric layer(202a,202b,202c). The dielectric constant of the dielectric layer(202c) is higher than the dielectric constant of the dielectric layer(202a).