| 摘要 |
<p>Production process of a flat suspended micro-structure using a sacrificial layer of polymer material and component obtained thereby The process successively comprises deposition of a sacrificial layer ( 2 ) of polymer material, deposition, on at least a part of the substrate ( 1 ) and of the front face of the sacrificial layer ( 2 ), of an embedding layer ( 6 ), the thickness whereof is larger than that of the sacrificial layer ( 2 ), and planarization so that the front faces of the sacrificial layer ( 2 ) and of the embedding layer ( 6 ) form a common flat surface. A formation layer ( 3 ) of a suspended structure ( 5 ) is deposited on the front face of the common flat surface. Planarization can comprise chemical mechanical polishing and etching of the embedding layer ( 6 ). Etching of the sacrificial layer ( 2 ) can be performed by means of a mask formed on the front face of a layer of polymer material eliminated during the planarization step.</p> |
