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发明名称
VERFAHREN ZUR HERSTELLUNG VON DREIDIMENSIONALEN SCHALTUNGEN
摘要
申请公布号
DE50000356(D1)
申请公布日期
2002.09.12
申请号
DE20005000356
申请日期
2000.04.10
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
BUCHNER, REINHOLD;RAMM, PETER
分类号
H01L21/98;H01L25/065;(IPC1-7):H01L21/98
主分类号
H01L21/98
代理机构
代理人
主权项
地址
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