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发明名称
P型氮化镓薄膜的活化方法
摘要
在本发明中我们将镁掺杂氮化镓薄膜照射不同剂量的加玛射线,使氮化镓薄膜在低温下,即可将镁-氢(Mg-H)中的氢原子分解,使镁受子活化,增加P型氮化镓的导电性,同时可避免一般使用热处理时因太高的温度造成在氮化镓中产生氮空隙缺陷的缺点。
申请公布号
TW502457
申请公布日期
2002.09.11
申请号
TW089109538
申请日期
2000.06.26
申请人
桂平宇
发明人
张连璧;桂平宇
分类号
H01L33/00
主分类号
H01L33/00
代理机构
代理人
主权项
1.一种促进镁掺杂氮化镓薄膜之活化的方法,其步骤如下:a)以氧化铝作为基材;b)以MOVPE法,先在氧化铝基材上,至少成长一层缓冲层或凝核层;c)至少成长一层n型氮化镓薄膜;d)至少再成长一层镁掺杂之氮化镓薄膜;e)照射加玛射线;f)热回火;g)镀上金属电极以制成电子或光电元件;在上列步骤中利用照射加玛射线并回火之过程,使镁掺杂氮化镓薄膜进一步活化。图式简单说明:图一为镁掺杂氮化镓薄膜照射加玛射线的光激萤光光谱。
地址
桃园县龙潭乡百年二街三十六之一号十三楼
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