| 发明名称 |
PIEZO-POSITIONER AND METHOD OF PRODUCING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezo-positioner whose driving tip end part hardly wears and a method of producing the same. SOLUTION: The piezo-positioner is composed of a series of piezo-devices made of a piezoelectric ceramic, and a ceramic plate is attached on the surface of the driving tip end part of the piezo-positioner. |
| 申请公布号 |
JP2002255667(A) |
申请公布日期 |
2002.09.11 |
| 申请号 |
JP20010057565 |
申请日期 |
2001.03.02 |
| 申请人 |
TAIHEIYO CEMENT CORP |
发明人 |
MINAMI NOBUYUKI;YASUDA TAKASHI;KUMAMOTO KENJI;EZAKI TORU |
| 分类号 |
C04B37/02;H01L41/09;H01L41/22;H01L41/313 |
主分类号 |
C04B37/02 |
| 代理机构 |
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代理人 |
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