| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical thin film which is excellent in heat resistance, and in particular, which keeps the adhesion property with a base body and not deteriorated in optical characteristics even when the film is subjected to heat cycles of repeated heating and cooling. SOLUTION: Silicon compounds such as SiN and SiO2 are used as the materials for respective layers of a multilayered film. A minute amount of at least one of boron, aluminum and indium or at least one heat-resistant dopant of phosphorus and antimony by a proper amount is incorporated into each layer. |
