| 摘要 |
PURPOSE: To provide a microscopic dimension measuring device capable of measuring an object to be measured, which has a dimension equivalent to or smaller than the resolving power of an optical microscope. CONSTITUTION: In this microscopic dimension measuring device, the image of the object to be measured is picked up by using an optical microscope and an image sensor, and signal positions at two points (a), (b) where a prescribed luminance level is matched is extracted from the image signal obtained, and based on the positional information between the two points, the dimension of the object to be measured is measured and calculated based on the positional information between the two points. Its feature is that the dimension of the object to be measured is measured based on multiplication made by multiplying the positional difference between two positions (a), (b) by the ratio of the maximum luminance c between the two points to the maximum luminance forming a reference.
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