摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable ink jet head which reduces fluctuations of an ink drop ejection property. SOLUTION: A first substrate 1 provided with a diaphragm 15 and a second substrate 2 provided with an electrode 22 are bonded together via a silicon oxidized film 25, so that a width W of a groove 24 for electrode separation between electrodes 22 is made to be not greater than double the thickness (t) of the silicon oxidized film 25.
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