发明名称 Modular fluid delivery apparatus
摘要 <p>A fluid delivery apparatus for transporting a fluid to one or more fluid handling components. The fluid delivery apparatus includes one or more modular subassemblies having an upper module (56), a lower module (59), and a base block (60). The upper module includes a passageway for coupling with a fluid handling component (51) such that the upper passageway is in fluid communication with the fluid handling component. The lower module includes a lower passageway for coupling with the upper module such that the passageways are in fluid communication. The lower module includes a flow channel having a lower passageway. The base block includes a receptacle and a channel. The upper module is received within the receptacle and the lower module extends through the channel. The modular subassembly can include a spacer having a plurality of alignment apertures for aligning fluid coupling ports of the upper and lower modules. A method of using the fluid delivery apparatus is also disclosed. <IMAGE></p>
申请公布号 EP1239203(A1) 申请公布日期 2002.09.11
申请号 EP20020251573 申请日期 2002.03.06
申请人 ASML US, INC. 发明人 NGUYEN, NHAN V.
分类号 F16L25/00;B67D3/00;C23C16/455;F16K27/00;F16L39/00;H01L21/205;(IPC1-7):F16K27/00 主分类号 F16L25/00
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