发明名称 TRANSFER SHEET OF PROTECTIVE FILM FOR PHOTOMASK
摘要 <p>PROBLEM TO BE SOLVED: To provide a protective film transfer sheet for a photomask which can transfer a protective film showing excellent adhesion property without requiring a heating process on the image face of a photomask and which can transfer a protective film having excellent scratching resistance and solvent resistance as the protective film to be transferred. SOLUTION: The protective film transfer sheet 1 has a protective film 3 on a removable supporting body 2, and the protective film 3 consists of, from the supporting body 2 side, a protective layer 31 and an adhesive layer 32 successively laminated. The adhesive layer 32 contains at least a tacky resin, a photo- cation polymerizable resin and a photo-cation polymerization initiator.</p>
申请公布号 JP2002258464(A) 申请公布日期 2002.09.11
申请号 JP20010053941 申请日期 2001.02.28
申请人 KIMOTO & CO LTD 发明人 MARUYAMA MITSUNORI;ONUMA TERUO;KURISHIMA SUSUMU
分类号 C09J7/02;C09J163/00;G03F1/48;(IPC1-7):G03F1/14 主分类号 C09J7/02
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