摘要 |
<p>PROBLEM TO BE SOLVED: To provide a protective film transfer sheet for a photomask which can transfer a protective film showing excellent adhesion property without requiring a heating process on the image face of a photomask and which can transfer a protective film having excellent scratching resistance and solvent resistance as the protective film to be transferred. SOLUTION: The protective film transfer sheet 1 has a protective film 3 on a removable supporting body 2, and the protective film 3 consists of, from the supporting body 2 side, a protective layer 31 and an adhesive layer 32 successively laminated. The adhesive layer 32 contains at least a tacky resin, a photo- cation polymerizable resin and a photo-cation polymerization initiator.</p> |