| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a diaphragm pump having extremely high delivery responsiveness and delivery accuracy. SOLUTION: A tube diaphragm 120 is built into the inside of a pump head 110, and its inside is provided with a pump chamber 121 and its outside is provided with a working fluid chamber 112 filled with incompressible working fluid B. The tube diaphragm pump has a cylinder 220 communicated with the working fluid chamber 112 and a plunger 230 of which tip side is stored in the cylinder 220 reciprocatively and base end side projects out of the cylinder 220. the plunger 230 is driven by a linearly driving mechanism 250 that is arranged in parallel with the plunger and linearly drives a movable body 256 along a driving shaft. The movable body 256 of the linearly driving mechanism 250 and the base end side of the plunger 230 are interconnected via a connecting member 270 having an automatically centering function.</p> |
