发明名称 Inertial temperature control system and method
摘要 <p>An inertial temperature control system and method are provided for changing the temperature of a body between two temperatures such that the ending temperature is reached smoothly without substantial temperature overshoot or oscillation. A temperature control algorithm is fed a set point temperature that accelerates and decelerates at a physically attainable rate. &lt;IMAGE&gt;</p>
申请公布号 EP1239357(A2) 申请公布日期 2002.09.11
申请号 EP20020250814 申请日期 2002.02.06
申请人 ASML US, INC. 发明人 STARNER, ALAN L.
分类号 G05B11/42;G05D23/19;H01L21/00;H05B1/02;(IPC1-7):G05D23/00;H05B6/06;C03B23/03 主分类号 G05B11/42
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