| 摘要 |
PROBLEM TO BE SOLVED: To suppress a pressure rise inside a vibration chamber and to improve the drive and the response at a low-voltage of the optical modulation element of an electrostatic actuator system by reducing an air damper effect. SOLUTION: The optical modulation element has a light reflector 1, an electrode substrate 3 which has a supporting part 12, a counter electrode 2 and a gap 8. Notches 10 are provided in the opposing supporting part 12 so as to be under cuts. The notches 10 increase the volume of the gap 8. Accordingly, the rise of pressure inside the gap is suppressed when the light reflector 1 is displaced, the air damper effect is reduced, and a driving voltage is lowered.
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