| 摘要 |
PROBLEM TO BE SOLVED: To drive a beam with a lower driving voltage by making the beam having a light reflection part easily deformable by the action of electrostatic attraction. SOLUTION: In the optical modulator, a deflection region 110 is formed at part of both ends-fixed beam 105, and particularly, is formed in the vicinity of one fixed end 105a. The deflection region 110 is bent into a V-shape at the space 108 side, and the extended direction of the ridgeline 112 of its apex is formed in parallel with the tangential direction (width direction) of the fixed end 105a. Thereby, the both ends-fixed beam 105 can be inclined to the space 108 side according to the deformation of the deflection region 110 caused by the action of electrostatic attraction. Accordingly, force to drive the both ends- fixed beam 105 is decreased, and a small voltage is enough to drive an electrode 103 and a pad 107.
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