发明名称 |
Method of calibrating cantilevers |
摘要 |
A method of and apparatus for calibrating a cantilever (12) of a scanning probe microscope provide for applying radiation pressure to the cantilever so as to deflect the cantilever and measuring the deflection of the cantilever. Radiation pressure is provided by a focused beam of radiation, preferably a laser beam (14) and deflection of the cantilever is measured by measuring a reflection of the laser beam. Preferably, the laser light beam used for calibration is the same as that used for measurement of beam deflection in a scanning probe microscope. This provides an effective non-destructive calibration system which can be performed repeatedly without damaging the cantilever. |
申请公布号 |
GB0217812(D0) |
申请公布日期 |
2002.09.11 |
申请号 |
GB20020017812 |
申请日期 |
2002.07.31 |
申请人 |
SECRETARY OF STATE FOR TRADE AND INDUSTRY, THE |
发明人 |
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分类号 |
G01Q20/02;G01Q40/00;G01Q70/00 |
主分类号 |
G01Q20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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